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<article article-type="research-article" dtd-version="1.1" xml:lang="en"><front xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:c="http://ns.iop.org/namespaces/content" xmlns:fn="http://www.w3.org/2005/xpath-functions" xmlns:m="http://ns.iop.org/namespaces/meta"><journal-meta><journal-id journal-id-type="publisher-id">d</journal-id><journal-id journal-id-type="coden">JPAPBE</journal-id><journal-title-group><journal-title xml:lang="en">Journal of Physics D: Applied Physics</journal-title><abbrev-journal-title abbrev-type="IOP" xml:lang="en">JPhysD</abbrev-journal-title><abbrev-journal-title abbrev-type="publisher" xml:lang="en">J. Phys. D: Appl. Phys.</abbrev-journal-title></journal-title-group><issn pub-type="ppub">0022-3727</issn><issn pub-type="epub">1361-6463</issn><publisher><publisher-name>IOP Publishing</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="publisher-id">dabddf8</article-id><article-id pub-id-type="doi">10.1088/1361-6463/abddf8</article-id><article-id pub-id-type="manuscript">abddf8</article-id><article-id pub-id-type="other">JPhysD-125885.R2</article-id><article-categories><subj-group subj-group-type="display-article-type"><subject>Paper</subject></subj-group><subj-group subj-group-type="section"><subject>Semiconductors and photonics</subject></subj-group></article-categories><title-group><article-title>Combined SEM-CL and STEM investigation of green InGaN quantum wells</article-title></title-group><contrib-group><contrib contrib-type="author" corresp="yes" xlink:type="simple"><contrib-id authenticated="false" contrib-id-type="orcid">0000-0003-2868-3416</contrib-id><name name-style="western"><surname>Ding</surname><given-names>B</given-names></name><xref ref-type="aff" rid="affiliation01">1</xref><xref ref-type="fn" rid="dabddf8fn2">*</xref><email>bd371@cam.ac.uk</email></contrib><contrib contrib-type="author" corresp="no" xlink:type="simple"><name name-style="western"><surname>Jarman</surname><given-names>J</given-names></name><xref ref-type="aff" rid="affiliation01">1</xref></contrib><contrib contrib-type="author" corresp="no" xlink:type="simple"><name name-style="western"><surname>Kappers</surname><given-names>M J</given-names></name><xref ref-type="aff" rid="affiliation01">1</xref></contrib><contrib contrib-type="author" corresp="yes" xlink:type="simple"><name name-style="western"><surname>Oliver</surname><given-names>R A</given-names></name><xref ref-type="aff" rid="affiliation01">1</xref><xref ref-type="fn" rid="dabddf8fn2">*</xref><email>rao28@cam.ac.uk</email></contrib><aff id="affiliation01">
               <label>1</label>
Department of Materials Science and Metallurgy, <institution xlink:type="simple">University of Cambridge</institution>, 27 Charles Babbage Road, Cambridge CB3 0FS, <country>United Kingdom</country>
            </aff></contrib-group><author-notes><fn id="dabddf8fn2"><label>2</label><p>To whom correspondence may be addressed.</p></fn></author-notes><pub-date pub-type="ppub"><day>22</day><month>4</month><year>2021</year></pub-date><pub-date pub-type="epub"><day>5</day><month>2</month><year>2021</year></pub-date><pub-date pub-type="open-access"><day>5</day><month>2</month><year>2021</year></pub-date><volume>54</volume><issue>16</issue><elocation-id content-type="artnum">165107</elocation-id><supplementary-material content-type="colour-figures" orientation="portrait" position="float" xlink:type="simple"/><history><date date-type="received"><day>14</day><month>9</month><year>2020</year></date><date date-type="revised"><day>19</day><month>12</month><year>2020</year></date><date date-type="accepted"><day>20</day><month>1</month><year>2021</year></date><date date-type="oa-requested"><day>2</day><month>12</month><year>2020</year></date></history><permissions><copyright-statement>© 2021 The Author(s). Published by IOP Publishing Ltd</copyright-statement><copyright-year>2021</copyright-year><license license-type="cc-by" xlink:href="http://creativecommons.org/licenses/by/4.0" xlink:type="simple"><license-p>
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Original content from this work may be used under the terms of the <ext-link ext-link-type="uri" xlink:href="http://creativecommons.org/licenses/by/4.0/" xlink:type="simple">Creative Commons Attribution 4.0 license</ext-link>. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.</license-p></license></permissions><self-uri content-type="pdf" xlink:href="https://cfn-live-content-bucket-iop-org.s3.amazonaws.com/journals/0022-3727/54/16/165107/2/d_54_16_165107.pdf?AWSAccessKeyId=AKIAYDKQL6LTV7YY2HIK&amp;Expires=1613140912&amp;Signature=51wl8ggChjh1Eb%2FEddqTEI755yw%3D" xlink:type="simple"/><abstract><title>Abstract</title><p>The microstructure of green-emitting InGaN/GaN quantum well (QW) samples grown at different temperatures was studied using cross-section scanning transmission electron microscopy (STEM) and plan-view cathodoluminescence (CL). The sample with the lowest InGaN growth temperature exhibits microscale variations in the CL intensity across the sample surface. Using STEM analysis of such areas, the observed darker patches do not correspond to any observable extended defect. Instead, they are related to changes in the extent of gross-well width fluctuations in the QWs, with more brightly emitting regions exhibiting a high density of such fluctuations, whilst dimmer regions were seen to have InGaN QWs with a more uniform thickness.</p></abstract><kwd-group kwd-group-type="author"><kwd>gallium nitride</kwd><kwd>green LEDs</kwd><kwd>quantum well</kwd><kwd>TEM</kwd><kwd>cathodoluminescence</kwd><kwd>AFM</kwd></kwd-group><funding-group><award-group xlink:type="simple"><funding-source xlink:type="simple">Engineering and Physical Sciences Research Council<named-content content-type="funder-id" xlink:type="simple">http://dx.doi.org/10.13039/501100000266</named-content>
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